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  • BSI
    20/30400313 DC BS ISO 23131. Ellipsometry. Principles
    Edition: 2020
    $44.66
    / user per year

Description of 20/30400313 DC 2020

This standard deals with ellipsometry, a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories, preferably for stand-alone measuring systems with special regard to ISO/IEC Guide 98-3 conforming presentation of the uncertainty of results.



Standard Number20/30400313 DC
TitleBS ISO 23131. Ellipsometry. Principles
StatusDefinitive
Publication Date2020-05-12
Identical National Standard OfISO/DIS 23131
DescriptorsFilters (optical), Optical-quantum generators, Optical brighteners, Optical chemical analysis, Optical phenomena
ICS17.020 Metrology and measurement in general
CommitteeSTI/33
PublisherBSI
Pages22

About BSI

BSI Group, also known as the British Standards Institution is the national standards body of the United Kingdom. BSI produces technical standards on a wide range of products and services and also supplies certification and standards-related services to businesses.
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