ASTM F1367-98
Historical Standard: ASTM F1367-98 Standard Specification for Chromium Sputtering Targets for Thin Film Applications
SUPERSEDED (see Active link, below)
ASTM F1367
1. Scope
1.1 This specification covers sputtering targets fabricated from chromium metal.
1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.
1.3 The values stated in SI units are regarded as standard.
2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.
ASTM Standards
E112 Test Methods for Determining Average Grain Size
Keywords
chromium; sputtering; targets; Chromium electronic materials/applications; Chromium sputtering targets; Electronic materials/applications--specifications; Sputtering process/targets--specifications; Targets ;
ICS Code
ICS Number Code 25.220.40 (Metallic coatings)
DOI: 10.1520/F1367-98
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