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BS EN ISO 25178-700:2023 Geometrical product specifications (GPS). Surface texture: Areal - Calibration, adjustment and verification of areal topography measuring instruments, 2023
- undefined [Go to Page]
- European foreword
- Endorsement notice
- Foreword
- Introduction
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 4 Symbols and abbreviated terms
- 5 Calibration, adjustment and verification of an instrument [Go to Page]
- 5.1 General
- 5.2 Methods for calibration, adjustment and verification
- 5.3 Instrument calibration procedure [Go to Page]
- 5.3.1 Calibration by measurement standards
- 5.3.2 Handling of defects on material measures
- 5.3.3 Measurement procedures for calibration with measurement standards
- 5.3.4 Calibration conditions
- 6 Determination of the metrological characteristics of the instrument [Go to Page]
- 6.1 General
- 6.2 Reporting of the measurement conditions
- 6.3 Handling of non-measured points
- 6.4 Handling of spurious data and outliers
- 6.5 Metrological characteristic: measurement noise, NM, and instrument noise, NI [Go to Page]
- 6.5.1 General
- 6.5.2 Determination of measurement and instrument noise: application of filters or operators
- 6.5.3 Determination of measurement and instrument noise: material measures for instrument and measurement noise estimation
- 6.5.4 Determination of measurement and instrument noise: procedure for the determination of measurement noise
- 6.6 Determination of flatness deviation [Go to Page]
- 6.6.1 General
- 6.6.2 Material measure for determination of flatness deviation
- 6.6.3 Procedure for determination of flatness deviation
- 6.6.4 Improvement of flatness deviation estimation
- 6.6.5 Application of filters and operators
- 6.6.6 Calibration of flatness deviation
- 6.7 Determination of the amplification coefficient αz for the z-axis [Go to Page]
- 6.7.1 General
- 6.7.2 Determination of the amplification coefficient αz for the z-axis: material measures
- 6.7.3 Procedure for determination of amplification coefficient αz for the instrument z-axis
- 6.7.4 Type PGR (profile-groove-rectangular): groove, straight (rectangular or trapezoidal) measurement areas
- 6.7.5 Other material measures for the instrument z-axis calibration
- 6.7.6 Procedure for determination of amplification coefficient αz for the instrument z-axis: range and distance of measurement positions for the calibration of the z-scale of the instrument
- 6.7.7 Range and distance of measurement position for the calibration of a reduced z-scale of the instrument
- 6.8 Determination of z-linearity deviation lz [Go to Page]
- 6.8.1 General
- 6.8.2 Determination of the complete and local z-linearity deviation lz: z-scan range
- 6.8.3 Determination of z-linearity deviation lz
- 6.8.4 Determination of z-linearity deviation lz: sizes of step heights to be measured
- 6.8.5 Determination of z-linearity deviation lz: positions within the instrument z-range
- 6.8.6 Determination of z-linearity deviation lz: Non-default methods
- 6.9 Determination of the amplification coefficients αx and αy in x- and y-direction and mapping deviation Δx (x,y) and Δy (x,y) [Go to Page]
- 6.9.1 General
- 6.9.2 Determination of the amplification coefficient αx and αy in x- and y-direction and mapping deviation Δx (x,y) and Δy (x,y): material measures
- 6.9.3 Determination of the amplification coefficient αx and αy in x- and y-direction and mapping deviation Δx (x,y) and Δy (x,y): assessed measurement volume
- 6.9.4 Procedure for the determination of the amplification coefficient αx and αy and mapping deviation Δx (x,y) and Δy (x,y) of the x- and y-axes
- 6.10 Perpendicularity of the instrument z-axis with respect to the x-y areal reference
- 6.11 Topographic spatial resolution WR [Go to Page]
- 6.11.1 General
- 6.11.2 Material measures for topographic spatial resolution
- 6.11.3 Instrument transfer function (ITF) curve fITF
- 6.11.4 Lateral period limit DLIM
- 6.11.5 Use of optical lateral resolution parameters
- 6.12 Topography fidelity TFI [Go to Page]
- 6.12.1 General
- 6.12.2 Determination of the topography fidelity TFI using reference metrology
- 6.12.3 Determination of the small-scale fidelity limit TFIL
- 6.12.4 Slope-dependent effects
- 7 General information
- Annex A (informative) Relation to the GPS matrix model
- Bibliography [Go to Page]